ISO 14644 Cleanroom Standards Explained

发布于: 2026-05-27 10:41
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ISO 14644 is the international standard for cleanroom classification and operation. This guide provides a comprehensive overview of the key requirements.

ISO 14644-1: Air Cleanliness Classification

The standard defines 9 cleanliness classes (ISO Class 1-9) based on airborne particle concentration:

  • ISO Class 5: ≤ 3,520 particles (≥ 0.5 μm) per m³
  • ISO Class 6: ≤ 35,200 particles (≥ 0.5 μm) per m³
  • ISO Class 7: ≤ 352,000 particles (≥ 0.5 μm) per m³
  • ISO Class 8: ≤ 3,520,000 particles (≥ 0.5 μm) per m³

ISO 14644-2: Monitoring Requirements

Regular monitoring ensures continued compliance:

  • Particle counting at defined frequencies
  • Pressure differential monitoring
  • Temperature and humidity control
  • Airflow velocity and volume verification

ISO 14644-3: Test Methods

Standardized test methods include:

  1. Particle counting using calibrated instruments
  2. Airflow visualization (smoke tests)
  3. Filter leak testing (DOP/PAO method)
  4. Recovery time testing

Compliance Documentation

Maintain comprehensive records:

  • Initial certification reports
  • Regular monitoring data
  • Filter replacement logs
  • Corrective action records
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